Author:
Reed G T,Rickman A G,Weiss B L,Namavar F,Cortesi E,Soref R A
Abstract
ABSTRACTResults are presented for the propagation loss of planar optical waveguides fabricated in SIMOX structures with Si overlayers whose thickness varies from 0.57 μm to 6.0 μm. The results demonstrate that thick Si overlayers are required to produce propagation losses below 1 dB/cm. In addition, the results of the coupling between two vertically integrated waveguides formed using two buried SiO2 layers are also reported.
Publisher
Springer Science and Business Media LLC
Cited by
2 articles.
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1. Silicon Photonics—The Evolution of Integration;Silicon Photonics for Telecommunications and Biomedicine;2011-12-16
2. Silicon-Based Optoelectronics;MRS Proceedings;1997