Author:
Molinari E.,Polini R.,Sessa V.,Terranova M.L.,Tomellini M.
Abstract
Particle size distributions derived from SEM micrographs of well-separated diamond particles, deposited on Si(100) substrates by the hot filament CVD method, have been analyzed in connection with previous measurements of particle growth rates. Rates of nucleation have been obtained from this analysis in an extended range of deposition conditions. A previously developed nucleation model has been utilized, and the kinetic parameters provide a framework for modeling the nucleation process from the gas phase.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
24 articles.
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