Abstract
AbstractThe presence of H in polycrystalline silicon gives rise to new and hitherto unexpected phenomena. In this paper two of the most recent observations are reviewed: (i) Hydrogen-induced metastable changes of the dark conductivity due to the formation and dissociation of an electrically active H complex and (ii) the generation of acceptor states during prolonged exposure of poly-Si to monatomic H at elevated temperatures. The observed type conversion is clearly due to the diffusion of excess H from the plasma since it does not occur during exposure to other species such as oxygen.
Publisher
Springer Science and Business Media LLC
Cited by
1 articles.
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