Investigation of Oxide/Metal Multilayers for Soft X-Ray Optics Fabricated by Ion Beam Sputterinc

Abstract

ABSTRACTThe dependence of the ordering factor and surface roughness of aiorphous SiO2 and Ni filis fabricated by Dual Ion Beai Sputtering(DIBS) assisted by Ar+ ion boibardient were evaluated. The ordering factor tas defined as a quantity which shows the degree of aiorphousness froi ris value of correlation function of the RHEED pattern. The surface roughness was leasured with a Talystep systei and STM, and the data was evaluated with respect to the spatial wavelength.For aiorphous SiO2 filis, the surface roughness is strongly correlated with the ordering factor as a parameter of the assisting Ar+ ion energy, and it depends on the fill structure. Siiilar relationship was not observed for Ni filis, because of the traced surface roughness of substrate in the energy region investigated.