Growth of (001)-Oriented Sbn Thin Films by Solid Source MOCVD

Abstract

AbstractBy the solid source MOCVD technique, we have deposited 2000 – 3000 Å thick single phase SrxBa1−xNb2O6 (SBN) films on (100) MgO substrates using tetramethylheptanedionate (thd) sources. X-ray diffraction (XRD) 2θ scans indicated that these films were completely (001) oriented. XRD Φ scans, however, showed the films contained four in-plane grain orientations whose volume fractions could be controlled by altering the Sr/(Sr+Ba) and Nb/(Sr+Ba) ratios in the source powders. The in-plane volume fractions did not change with the deposition rate or the cooling rate. Films with composition Sr0 58Ba0.42Nb1.94O6 had mainly two in-plane orientations. Optical waveguiding behavior was demonstrated in these films. Refractive indices were found to be no= 2.20 and ne = 2.13, as compared to no = 2.31 and ne = 2.27 for bulk SBN60.