Raman and Optical Characterization of Porous Silicon

Abstract

ABSTRACTRaman spectra from electrochemically etched porous silicon are correlated with photoluminescence (PL) data from the same spots of the sample. This correlation is consistent with optical properties of quantum confinement. The dielectric constant determined from angle resolved ellipsometry gives values far below that of bulk silicon. This reduction is due to the combined effects of voids as well as quantum confinement. The PL spectrum shows a weak high energy peak around 2.8eV in addition to the strong broad peak at 1.5 to 1.9eV. The temperature dependence of PL resembles that of bound excitons such as Si:S, having a thermal dissociation energy of 100 meV near room temperature. The radiation life time changes from tens of microseconds near room temperature to a few milliseconds at liquid helium temperatures. The rapid increase in lifetime and decrease in PL intensity at low temperatures indicates that phonons are probably involved.