Author:
Bowen D.K.,Hill M.J.,Tanner B.K.
Abstract
ABSTRACTThe application of double crystal X-ray diffractometry and computer simulation to the characterization of lattice parameter variations through the thickness of heteroepitaxial layers is reviewed. The sensitivity is demonstrated in studies of graded layers grown by vapour phase epitaxy. Capping layers significantly affect rocking curves from superlattice structures. The use of glancing angle diffraction to characterize thin, low period multilayers is examined.
Publisher
Springer Science and Business Media LLC
Cited by
3 articles.
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