Author:
Knapp J. A.,Follstaedt D. M.,Barbour J. C.,Myers S. M.,Ager J. W.,Monteiro O. R.,Brown I. G.
Abstract
AbstractWe present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness.
Publisher
Springer Science and Business Media LLC
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