Ion Implantation of Polymers

Author:

Dresselhaus M.S.,Wasserman B.,Wnek G.E.

Abstract

ABSTRACTIon implantation provides a mechanism for radically modifying the electronic and transport properties of a variety of polymers that are normally insulating. By using masks and tailoring the implanted species and ion energies, conducting paths in an insulating medium can be fabricated between specific reference points, an application of obvious relevance to the microelectronics industry. Specific results are reported for modification of the structure, electrical conductivity, thermoelectric-power, optical transmission and electron spin resonance for several polymers under a variety of implantation conditions. The temperature and frequency dependence of the conductivity suggest a onedimensional variable range hopping mechanism for conduction along the polymer chains. Comparison is made between implantation in the 200 keV and 2 MeV energy ranges.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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