A mathematical model for chemical vapor infiltration with microwave heating and external cooling

Abstract

A mathematical model has been used to compute temperature profiles in ceramic preforms that are heated by microwaves. The temperature profiles were then input to a second part of the model describing chemical vapor infiltration of the preform, that is the diffusion of gaseous reactants, heterogeneous reaction, and evolution of the pore structure. Equations were solved numerically for parameters corresponding to the infiltration of SiC preforms by pyrolysis of trichloromethylsilane. While based on some simplifications, the model leads to the conclusion that infiltration proceeds more rapidly, and to a greater extent, with microwave heating/external cooling than in isothermal infiltration. The model suggests that infiltration might be optimized by manipulation of microwave power and external cooling. The computed extent of infiltration is seen to be very sensitive to the initial pore size.