Abstract
ABSTRACTA review is given of the current status of amorphous Si(a-Si) and related alloys prepared by photo-CVD. Preparation techniques and film quality of the following materials will be reviewed;
•undoped a-Si films,•highly conductive n-type and p-type μc-Si films, a-SiGe films.•a-SiC films, superlattice structures.Finally, the present status of a-Si solar cell performance prepared by photo-CVD will be introduced and the merit of photo-CVD will be discussed.
Publisher
Springer Science and Business Media LLC
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