Abstract
AbstractThere are four easily identified stages in the formation of a hydrogenated amorphous silicon film from an electrical discharge in silane. The first stage is the primary reaction between electrons and silane resulting in a mixture of ions and free radicals. The second stage is the transport of these species to the substrate surface accompanied in parallel by a multiplicity of secondary reactions e.g. ion-molecule, photon-molecule, etc. The third stage is the reaction or adsorption of these species with or onto the substrate surface and the fourth stage is the process by which these species or their reaction products incorporate into the growing film or are reemitted from the surface into the gas phase.
Publisher
Springer Science and Business Media LLC
Cited by
13 articles.
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