Rapid Annealing of GaAs and Related Compounds

Author:

Williams J.S.,Pearton S.J.

Abstract

ABSTRACTIn recent years, rapid annealing of GaAs has been employed to activate ion implanted dopants and to produce metal-semiconductor contacts. More recently, rapid heating techniques have been used to anneal heterostructures without degrading requisite high mobilities of SDHT devices. This paper reviews the various annealing regimes which are useful for heat treating GaAs and related compounds. Examples are chosen which illustrate unique and potentially useful features of rapid annealing.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference60 articles.

1. The Effects of Tungsten-Halogen Lamp Annealing on a Selectively Doped GaAs/N-AlGaAs Heterostructure Grown by MBE

2. 59 Orrmon K.G. -Rossiter, Johnson S.T. and Williams J.S. , Nucl. Instr. Methods (in press).

3. 58 Pearton S.J. , Boerma D.O. , Poate J.M. , Williams J.S. , Johnson S.T. and Orrman-Rossiter K.G. , unpublished.

4. 56 Soloman J. and Smith S. , private communication

5. 54 Fan J.C.C. , this symposium.

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1. Chapter 8 Ion Implantation and Thermal Annealing of III-V Compound Semiconducting Systems: Some Problems of III-V Narrow Gap Semiconductors;Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization;1997

2. Ion Implantation in Compound Semiconductor and Buried Layer Synthesis;Ion Implantation: Basics to Device Fabrication;1995

3. Modifizierung von Oberflächen durch Ionenstrahl-Verfahren;WFT Werkstoff-Forschung und -Technik;1991

4. Mev Ion Beam Applications In III-V Semiconductors;MRS Proceedings;1990

5. Halogen lamp rapid thermal annealing of Si- and Be-implanted In0.53Ga0.47As;Journal of Electronic Materials;1989-03

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