Author:
Chen Jiayu,Udayakumar K. R.,Brooks Keith G.,Cross L. Eric.
Abstract
AbstractFerroelectric thin films of PZT and PMN-PT were fabricated by the solgel spin-on technique. The films show high dielectric constants, polarization and breakdown strength values. Using a laser interferometer (ultradilatometer), the piezoelectric and electrostrictive coefficients of the films were measured. The results indicate that the sol-gel derived ferroelectric thin films have good electromechanical properties and can be used in rnicroactuator applications.
Publisher
Springer Science and Business Media LLC
Cited by
7 articles.
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