Author:
Brodkin J. S.,Franzen W.,Culbertson R. J.,Williams J. M.
Abstract
AbstractThe change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.
Publisher
Springer Science and Business Media LLC