Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films-Reference-Cited by-同舟云学术

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Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

Published:2020-05-05 Issue: Volume:8 Page:
ISSN:2296-424X
Container-title:Frontiers in Physics
language:
Short-container-title:Front. Phys.

Author:

Alsaad A. M.,Al-Bataineh Qais M.,Qattan I. A.,Ahmad Ahmad A.,Ababneh A.,Albataineh Zaid,Aljarrah Ihsan A.,Telfah Ahmad

Publisher

Frontiers Media SA

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy,Mathematical Physics,Materials Science (miscellaneous),Biophysics

Reference104 articles.

1. Characterization of AlN thin films prepared by unbalanced magnetron sputtering;Wang;J Electrochem Soc,2004

2. Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films;Akiyama;J Appl Phy,2006

3. Integrated power harvesting system including a MEMS generator and a power management circuit;Marzencki;Sens Actuat A,2008

4. Fabrication of AlN/Si SAW delay lines with very low RF signal noise;Ingrosso;Microelectronic Eng,2007

5. XRD characterization of AlN thin films prepared by reactive RF-sputter deposition;Matsunami;Adv Mater Phy Chem,2013

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1. Effect of lanthanum doped SnO2 on the performance of mixed-cation mixed-halide perovskite layer;Journal of Molecular Structure;2025-02

2. MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy;Journal of Vacuum Science & Technology A;2024-07-10

3. New 2D penta-SiPN: A wide and indirect bandgap semiconductor;Journal of Physics: Conference Series;2024-04-01

4. Nucleation of highly uniform AlN thin films by high volume batch ALD on 200 mm platform;Journal of Vacuum Science & Technology A;2024-03-06

5. Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride ⟨100⟩ thin film growth using ceramic target;Journal of Materials Research and Technology;2024-03

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