1. Center for Nanotechnologies, Alferov University, 194021 St. Petersburg, Russia
2. Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, 9 Institutskiy Lane, 141701 Dolgoprudny, Russia
3. Lab. "Characterization of Materials and Structures of Solid State Electronics", Ioffe Institute, 194021 St. Petersburg, Russia
4. Department of Solid State Physics, Saint Petersburg State University, 199034 St. Petersburg, Russia
5. Department of Nanotechnology Methods and Instruments, IAI RAS, 198095 St. Petersburg, Russia