Linear Capacitive Pressure Sensor with Gradient Architecture through Laser Ablation on MWCNT/Ecoflex Film

Abstract

The practical application of flexible pressure sensors, including electronic skins, wearable devices, human–machine interaction, etc., has attracted widespread attention. However, the linear response range of pressure sensors remains an issue. Ecoflex, as a silicone rubber, is a common material for flexible pressure sensors. Herein, we have innovatively designed and fabricated a pressure sensor with a gradient micro-cone architecture generated by CO2 laser ablation of MWCNT/Ecoflex dielectric layer film. In cooperation with the gradient micro-cone architecture and a dielectric layer of MWCNT/Ecoflex with a variable high dielectric constant under pressure, the pressure sensor exhibits linearity (R2 = 0.990) within the pressure range of 0–60 kPa, boasting a sensitivity of 0.75 kPa−1. Secondly, the sensor exhibits a rapid response time of 95 ms, a recovery time of 129 ms, hysteresis of 6.6%, and stability over 500 cycles. Moreover, the sensor effectively exhibited comprehensive detection of physiological signals, airflow detection, and Morse code communication, thereby demonstrating the potential for various applications.