Evaluation of Isomotive Insulator-Based Dielectrophoretic Device by Measuring the Particle Velocity

Abstract

Many dielectrophoretic (DEP) devices for biomedical application have been suggested, such as the separation, concentration, and detection of biological cells or molecules. Most of these devices utilize the difference in their DEP properties. However, single-cell analysis is required to evaluate individual properties. Therefore, this paper proposed a modified isomotive insulator-based DEP (iDEP) creek-gap device for straightforward single-cell analysis, which is capable of measurement at a wide frequency band. The proposed iDEP device generates more constant particle velocity than the previous study. The insulator was fabricated using backside exposure for accurate forming. We measured the distribution of the particle velocity and frequency property, using homogeneous polystyrene particles to verify the effectiveness of the proposed device. The results show that the particle velocity distribution was consistent with the distribution of the numerically calculated electric field square (∇Erms2). Furthermore, the velocity measurement, at a wide frequency band, from 10 Hz to 20 MHz, was performed because of the long distance between electrodes. These results suggest that the prop-erties of various particles or cells can be obtained by simple measurement using the proposed device.