PSO-SVM Based Performance-Driving Scheduling Method for Semiconductor Manufacturing Systems

Abstract

There are currently many studies on data-driven optimization scheduling, but only a few studies have combined “closed-loop optimization” with “performance-driven”. Therefore, this research proposed a PSO-SVM-based (particle swarm optimization optimized support vector machine) scheduling method that reconciles the composite dispatching rules (CDR), performance-driving ideology, and feedback mechanism ideology. Firstly, the composite dispatching rules coalesce flexible equipment maintenance, multiple process constraints, and dynamic dispatching. Secondly, the performance-driving ideology is carried out through two learning models based on the PSO-SVM algorithm, based on targeted optimizing performances. Thirdly, the feedback mechanism ideology makes the scheduling method realize closed-loop optimizations adaptively. Finally, the superiority of the proposed scheduling method is validated in a semiconductor manufacturing system in China. Compared with CDR, the proposed scheduling method combines MOV, PR, and EU, respectively EU_ O, EU_ P, PCSR and ODR increased by 7.85%, 5.11%, 8.76%, 8.14%, 6.60%, and 7.33%, indicating the superiority of this method.