Abstract
For accelerometers targeted in inertial navigation field, the DC bias error is the most destructive system error, affecting the final precision of long-term dead reckoning. This paper proposes a novel self-test and self-calibration technique for canceling out the DC bias error of the digital closed-loop accelerometers. The self-test of system DC bias is realized by injecting a 1-Bit ΣΔ modulated digital excitation and measuring the second-order harmonic distortion. As illustrated, the second-order harmonic distortion is related to the servo position deviation of the MEMS sensing element, which is one of the main causes of system DC bias error. The automatic capacitance compensation is carried out based on the amplitude and phase information of the detected second-order harmonic distortion, which can dynamically calibrate out the DC bias error. Test results show that there exists a near-linearity relationship between the system DC bias error and the second-order harmonic distortion, which is consistent with the proposed theoretical deduction. Based on the proposed method, the system DC bias error is effectively reduced from 150 to 4 mg, and unaffected by external acceleration bias.
Funder
Scientific Research Fund of Institute of Engineering Mechanics, China Earthquake Administration
National Natural Science Foundation of Heilongjiang Province
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference15 articles.
1. Shkel, A.M. (2013, January 23–25). Precision navigation and timing enabled by microtechnology: Are we there yet?. Proceedings of the ION 2013 Pacific PNT Meeting, Honolulu, HI, USA.
2. Deb, N., and Blanton, R.D. (2002, January 10–10). Built-in self test of CMOS-MEMS accelerometers. Proceedings of the International Test Conference, Baltimore, MD, USA.
3. Trusov, A.A., Zotov, S.A., Simon, B.R., and Shkel, A.M. (2013, January 20–24). Silicon accelerometer with differential frequency modulation and continuous self-calibration. Proceedings of the 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan.
4. Balachandran, G.K., Petkov, V.P., Mayer, T., and Baislink, T. (2015, January 22–26). 27.1 a 3-axis gyroscope for electronic stability control with continuous self-test. Proceedings of the 2015 IEEE International Solid-State Circuits Conference—(ISSCC) Digest of Technical Papers, San Francisco, CA, USA.
5. Basith, I.I., Kandalaft, N., and Rashidzadeh, R. (2010, January 1–4). Built-in self-test for capacitive MEMS using a charge control technique. Proceedings of the 2010 19th IEEE Asian Test Symposium, Shanghai, China.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献