Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment-Reference-Cited by-同舟云学术

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Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment

Published:2015-04-16 Issue:4 Volume:15 Page:8945-8967
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Haque Rubaiyet,Loussert Christophe,Sergent Michelle,Benaben Patrick,Boddaert Xavier

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/15/4/8945/pdf

Reference33 articles.

1. A Review of Silicon Microphones;Scheeper;Sens. Actuators A Phys.,1994

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