Design of Broadband High-Frequency Multi-Throw RF-MEMS Switches

Author:

Yu Jian1234,Zhang Maoyun1234,Li Jing1234,Si Yuheng1234,Zhu Zijun25,Wu Qiannan2345ORCID,Li Mengwei12346

Affiliation:

1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China

2. School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China

3. Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China

4. Center for Microsystem Intergration, North University of China, Taiyuan 030051, China

5. School of Semiconductors and Physics, North University of China, Taiyuan 030051, China

6. Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China

Abstract

This paper introduces a broadband triple-pole triple-throw (3P3T) RF MEMS switch with a frequency range from DC to 380 GHz. The switch achieves precise signal control and efficient modulation through its six-port design. It achieves an insertion loss of −0.66 dB across its frequency range, with isolation and return loss metrics of −32 dB and −15 dB, respectively. With its low actuation voltage of 6.8 V and rapid response time of 2.28 μs, the switch exemplifies power-efficient and prompt switching performance. The compact design is ideal for integration into space-conscious systems. This switch is pivotal for 6G research and has potential applications in satellite communications, military radar systems, and next-generation radio applications that require multi-antenna access.

Funder

Double First-Class Talent Plan Construction

Double First-Class disciplines National first-class curriculum construction

Double First Class Disciplines Construction

National Future Technical College Construction Project

Publisher

MDPI AG

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