1. Department of Electronics Technology, Faculty of Electronic Engineering and Informatics, Budapest University of Technology and Economics, H-1111 Budapest, Hungary
2. Department of Electrotechnology, Faculty of Electrical Engineering, Czech Technical University, 166 27 Prague, Czech Republic
3. Łukasiewicz Research Network-Institute of Microelectronics and Photonics, LTCC Research Group, 02-255 Kraków, Poland