Abstract
A double-sided freeform lens is proposed for collimating light emitted from light emitting diodes (LEDs). The surface profiles of the lens are mathematically characterized and precisely determined based on a point-source assumption and differential geometry theory. The proposed lens design method is straightforward, flexible, and effective. Moreover, the optical performance of the lens can be intuitively adjusted by tuning just a small number of design parameters. The simulation results showed that the proposed lens achieved an excellent collimating effect for a commercial ultraviolet (UV) LED. A prototype lens is fabricated in UV-grade poly(methyl methacrylate) material using a standard injection molding process. The light collimating effect of the lens/UV-LED assembly was measured experimentally and was shown to be in good agreement with the simulation results. The collimating angle at the half-energy level was equal to 1.88°. The performance of the UV-LED is thus comparable to that of conventional lithography UV light sources based on mercury arc lamps. Consequently, the proposed double freeform lens showed significant potential for photolithography applications within the industry.
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献