1. Department of Chemical & Materials Engineering, Chung Cheng Institute of Technology, National Defense University, Taoyuan 335, Taiwan
2. System Engineering and Technology Program, National Chiao Tung University, Hsinchu 300, Taiwan
3. Department of Material Engineering, Ming Chi University of Technology, New Taipei 24301, Taiwan
4. Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei 243303, Taiwan