Ca-Doped ZnO:Al Thin Films: Synthesis and Characterization

Abstract

We unveiled the effect of doping on the morpho-structural and opto/electrical properties of Ca-doped ZnO:Al thin films obtained by RF magnetron sputtering. Scanning electron microscopy (SEM) was performed to reveal the surface morphology, while the composition and crystal structure were investigated by energy dispersive X-ray spectroscopy (EDX) and X-ray diffraction (XRD). The correlation between the microstructure and the electrical conductivity identifies an increase in electrical conductivity up to 145 × 10−3 Ω−1·m−1 at 5 wt.% Ca doping level with the decrease in the grain size. Furthermore, the presence of Ca dopant triggers the occurrence of the emission peak at 430 nm and an increase of the green emission peak in PL spectra. Corroborating the electrical measurements with X-ray diffraction and optical measurements, one can infer that the electrical conductivity is dominated by intrinsic defects developed during deposition and by the existence of dopants.