Niobium Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates

Abstract

Niobium oxide thin films were grown on both rigid and flexible substrates using DC magnetron sputtering for electrochromic applications. Three experimental series were conducted, varying the oxygen to argon flow rate ratio and deposition time. In the first series, the oxygen to argon ratio was adjusted from 0 to 0.32 while maintaining a constant growth time of 30 min. For the second and third series, the oxygen to argon ratios were fixed at 0.40 and 0.56, respectively, with deposition times ranging from 15 to 60 min. A structural transition from crystalline to amorphous was observed at an oxygen to argon flow rate ratio of 0.32. This transition coincided with a change in appearance, from non-transparent with metallic-like electrical conductivity to transparent with dielectric behavior. The transparent niobium oxide films exhibited thicknesses between 51 nm and 198 nm, with a compact, dense, and featureless morphology, as evidenced by both top-view and cross-sectional images. Films deposited on flexible indium tin oxide (ITO)-coated polyethylene terephthalate (PET) substrates displayed a maximum surface roughness (Sq) of 9 nm and a maximum optical transmission of 83% in the visible range. The electrochromic response of niobium oxide thin films on ITO-coated PET substrates demonstrated a maximum coloration efficiency of 30 cm2 C−1 and a reversibility of 96%. Mechanical performance was assessed through bending tests. The ITO-coated PET substrate exhibited a critical bending radius of 6.5 mm. Upon the addition of the niobium oxide layer, this decreased to 5 mm. Electrical resistance measurements indicated that the niobium oxide film mitigated rapid mechanical degradation of the underlying ITO electrode beyond the critical bending radius.