Affiliation:
1. Federal State Budgetary Institution “Technological Institute for Superhard and Novel Carbon Materials” (FSBI TISNCM), Troitsk, 108840 Moscow, Russia
Abstract
The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/Al0.73Sc0.27N/Mo/(100) diamond/Mo, was produced using aluminum–scandium nitride composition, and was studied in detail for a number of the Mo films with different thicknesses obtained by magnetron deposition. The operational frequency band of 3.3 … 18 GHz was used. It was found that the dependence of the resonant frequency shift vs. the h(Mo) thickness for all the overtones to be investigated was linear. For a given sensor, it was found that the mass sensitivity per unit area rm was equal to −26 × 10−12 and −8.7 × 10−12 g/(cm2∙Hz) at 6.0 GHz and 18.3 GHz, respectively. The frequency dependencies of quality factor Q, which changed as a result of Mo film deposition, were considered as the basic experimental data. A method for extracting the α(Mo) values was proposed. The Q-factor under the complete deposition of Mo film was 936 nm, and dropped moderately to ~25%. Such values were enough for an aim of the given experiment. The α(f) in molybdenum was obtained, and demonstrated a dependence that was close to quadratic, corresponding to the Akhiezer attenuation law.
Funder
the Shared Research Facilities “Research of Nanostructured, Carbon and Superhard Materials” FSBI TISNCM
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
1 articles.
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