Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film

Author:

Sorokin Boris1ORCID,Asafiev Nikita1ORCID,Yashin Dmitry1,Luparev Nikolay1,Golovanov Anton1,Kravchuk Konstantin1

Affiliation:

1. Federal State Budgetary Institution “Technological Institute for Superhard and Novel Carbon Materials” (FSBI TISNCM), Troitsk, 108840 Moscow, Russia

Abstract

The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/Al0.73Sc0.27N/Mo/(100) diamond/Mo, was produced using aluminum–scandium nitride composition, and was studied in detail for a number of the Mo films with different thicknesses obtained by magnetron deposition. The operational frequency band of 3.3 … 18 GHz was used. It was found that the dependence of the resonant frequency shift vs. the h(Mo) thickness for all the overtones to be investigated was linear. For a given sensor, it was found that the mass sensitivity per unit area rm was equal to −26 × 10−12 and −8.7 × 10−12 g/(cm2∙Hz) at 6.0 GHz and 18.3 GHz, respectively. The frequency dependencies of quality factor Q, which changed as a result of Mo film deposition, were considered as the basic experimental data. A method for extracting the α(Mo) values was proposed. The Q-factor under the complete deposition of Mo film was 936 nm, and dropped moderately to ~25%. Such values were enough for an aim of the given experiment. The α(f) in molybdenum was obtained, and demonstrated a dependence that was close to quadratic, corresponding to the Akhiezer attenuation law.

Funder

the Shared Research Facilities “Research of Nanostructured, Carbon and Superhard Materials” FSBI TISNCM

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Measurement of Intrinsic Mechanical Loss in Aluminum Films from 3 to 25 GHz by HBAR Spectroscopy;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

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