Author:
Wang Chao,Zhang Tao,Wang Weibo
Abstract
A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the evaluation function for realizing accurate quantitative analysis of image defocusing. By imaging a resolution target that corresponded to 228 line pairs per mm, the validity and imaging ability of the system was proven. The results of repeated focusing tests yielded a standard deviation of 0.75 μm, which indicated high performance accuracy for the focusing system. The proposed system has potential applications in industrial inspection and focusing detection.
Funder
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science