1. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong University, Xi’an 710056, China
3. School of Electrical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
4. School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, China