Abstract
In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y3Fe5O12 target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated by a nano-second pulse laser, taking into account the plasma shielding effect. Further, the gas dynamics model is employed to simulate the kinetic of plasma plume expansion. The results may be important in obtaining high-quality Y3Fe5O12 thin films.
Funder
Research Organization for Nanotechnology and Materials, National Research and Innovation Agency
School of Electrical Engineering and Informatics, Bandung Institute of Technology
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
1 articles.
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