1. Center for MicroElectroMechanical Systems (CMEMS-UMinho), University of Minho, Campus de Azurém, 4800-058 Guimarães, Portugal
2. LABBELS—Associate Laboratory, 4710-057 Braga, Portugal
3. CIDEM-DEM/ISEP, School of Engineering, Polytechnic Institute of Porto, Rua Dr. Roberto Frias, 712, 4200-465 Porto, Portugal
4. Palbit S.A., 3854-908 Branca, Portugal
5. CICECO, Aveiro Institute of Materials, Department of Materials and Ceramic Engineering, University of Aveiro, 3810-193 Aveiro, Portugal