Affiliation:
1. Department of Semiconductor Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea
Abstract
This study introduces a readout integrated circuit (ROIC) tailored for multi-gas sensor arrays featuring a proposed baseline calibration scheme aimed at mitigating the issue of sensor baseline variation. Unlike previous approaches, the proposed scheme stores each sensor’s baseline value and dynamically updates the signal extraction range accordingly during ROIC operation. This adjustment allows for the optimal use of the ROIC’s dynamic range, enhancing sensor uniformity and accuracy without the need for complex additional circuitry or advanced post-processing algorithms. We fabricated a prototype ROIC using a 180 nm CMOS process, achieving a low power consumption of 0.43 mW and a conversion rate of 50 kSPS. The prototype boasts an integrated noise level of 9.9 μVRMS across a frequency range of 0.1 Hz to 5 kHz and a dynamic range of 142.6 dB, coupled with superior linearity, indicated by a maximum integral non-linearity (INL) of −75.71 dB. This design significantly reduces sensor offset scattering to within 1 LSB of the A/D reference scale. In this study, the efficacy of the proposed scheme was validated using Figaro TGS-2600. The ROIC targets a sensitivity range from 0.54 to 0.23 for gas concentrations ranging from 5 ppm to 20 ppm and a resolution of 39 Ω for sensor resistance range from 10 kΩ to 90 kΩ. The enhancements in performance make the proposed ROIC a promising solution for precise gas concentration detection in sensor applications.
Funder
National Research Foundation of Korea (NRF), Ministry of Science and ICT