A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/16/2/210/pdf
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1. Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes;Bao,2000
2. Design, modeling and FEM-based simulations of a 1-DoF MEMS bulk micromachined piezoresistive accelerometer
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5. Asymmetric air-spaced cantilevers for vibration energy harvesting
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