Phase-Only Liquid-Crystal-on-Silicon Spatial-Light-Modulator Uniformity Measurement with Improved Classical Polarimetric Method

Abstract

The classical polarimetric method has been widely used in liquid crystal on silicon (LCoS) phase measurement with a simple optical setup. However, due to interference caused by LCoS cover glass reflections, the method lacks accuracy for phase uniformity measurements. This paper is aimed at mathematically analyzing the errors caused by non-ideal glass reflections and proposing procedures to reduce or eliminate such errors. The measurement is discussed in three conditions, including the ideal condition with no reflections from the LCoS cover glass, the condition with only the front reflection from the cover glass, and the condition with only the back reflection from the cover glass. It is discovered that the backward reflection makes the largest contribution to the overall measurement error, and it is the main obstacle to high-quality measurements. Several procedures, including optical alignment, LC layer thickness measurement, and phase estimation method, are proposed, making the uniformity measurement more qualitative and consistent.