1. Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, School of Electronic Science and Engineering & International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong University, Xi’an 710049, China
2. Instrumental Analysis Center of Xi’an Jiaotong University, Xi’an 710049, China
3. School of Microelectronics, Xidian University, Xi’an 740071, China