Microshape Measurement Method Using Speckle Interferometry Based on Phase Analysis

Abstract

A method for the measurement of the shape of a fine structure beyond the diffraction limit based on speckle interferometry has been reported. In this paper, the mechanism for measuring the shape of the fine structure in speckle interferometry using scattered light as the illumination light is discussed. Furthermore, by analyzing the phase distribution of the scattered light from the surface of the measured object, this method can be used to measure the shapes of periodic structures and single silica microspheres beyond the diffraction limit.