Author:
Nakazawa Kenta,Sasaki Takashi,Furuta Hiromasa,Kamiya Jiro,Sasaki Hideki,Kamiya Toshikazu,Hane Kazuhiro
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
9 articles.
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1. Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Varifocal MEMS mirrors for high-speed axial focus scanning: a review;Microsystems & Nanoengineering;2023-10-27
3. アフィリエイト通信;Journal of the Japan Society for Precision Engineering;2023-07-05
4. Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control;Journal of Micromechanics and Microengineering;2022-11-18
5. Resonant Varifocal Mems Mirror;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09