Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry-Reference-Cited by-同舟云学术

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Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Published:2011-12-27 Issue:1 Volume:12 Page:175-188
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Guo Tong,Wang Siming,Dorantes-Gonzalez Dante J.,Chen Jinping,Fu Xing,Hu Xiaotang

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/12/1/175/pdf

Reference16 articles.

1. Atomic force microscope;Binnig;Phys. Rev. Lett,1986

2. Micro-motion analyzer used for dynamic MEMS characterization;Guo;Opt. Lasers Eng,2009

3. Large scan area high-speed atomic force microscopy using a resonant scanner;Zhao;Rev. Sci. Instrum,2009

4. High performance feedback for fast scanning atomic force microscopes;Schitter;Rev. Sci. Instrum,2001

5. Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

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