Abstract
A mixture of positive and negative static charges exists in the same plane on an insulator surface, and this can cause production quality problems at manufacturing sites. This study developed a system with a vibration array sensor to rapidly measure the surface potential distribution of an object in a non-contact and non-destructive manner and with a high spatial resolution of 1 mm. The measurement accuracy differed greatly depending on the scanning speed of the array sensor, and an optimum scanning speed of 10 mm/s enabled rapid measurements (within <3 s) of the surface potential distribution of a charged insulator (area of 30 mm × 30 mm) with an accuracy of 15%. The relationship between charge and dust on the surface was clarified to easily visualize the uneven static charges present on it and thereby eliminate static electricity.
Funder
Japan Science and Technology Agency
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献