Abstract
The structural properties of ferroelectric films of barium titanate-stannate on alumina substrates and the microwave characteristics of planar capacitive elements based on them are studied. It is established that the composition of the gas medium and the temperature of the substrate during the deposition of the film has a significant effect on the crystal structure, phase composition of the films and their electrical characteristics. Planar capacitors based on films subjected to high-temperature annealing after deposition exhibit 85% tunability at a frequency of 2 GHz, which is the best result for today.
Funder
Russian Foundation for Fundamental Investigations
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Cited by
8 articles.
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