Chemical and Molecular Variations in Commercial Epoxide Photoresists for X-ray Lithography
Author:
Publisher
MDPI AG
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Link
http://www.mdpi.com/2076-3417/8/4/528/pdf
Reference44 articles.
1. Characterization method for new resist formulations for HAR patterns made by X-ray lithography
2. A comparative study of different thick photoresists for MEMS applications
3. Key issues in fabricating microstructures with high aspect ratios by using deep X-ray lithography
4. Characterizing and smoothing of striated sidewall morphology on UV-exposed thick SU-8 structures for micromachining millimeter wave circuits;Ruilin;J. Micromech. Microeng.,2010
5. Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Synthesis and luminescence properties of a bluish-green -emitting Sr3LiSbO6: Pr3+ phosphor for optoelectronic applications;Ceramics International;2023-12
2. Effect of short-chain architecture on the resulting thermal properties of polypropylene;Polymer;2023-01
3. Bitki ekstraktı (Lavandula officinalis L.) ile gümüş nanotel sentezinde fotokatalizin flavonoidler ile ilişkisi;Süleyman Demirel Üniversitesi Fen Bilimleri Enstitüsü Dergisi;2022-08-20
4. Lithographic Performance of Aryl Epoxy Thermoset Resins as Negative Tone Photoresist for Microlithography;Polymers;2020-10-14
5. Epoxy Resins for Negative Tone Photoresists;Polymers;2019-09-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3