Research on Parallel Reading and Drawing Techniques for Chemical Mechanical Polishing Simulation Data Based on Multi-Thread
Author:
Affiliation:
1. The EDA Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2. The School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
Abstract
Publisher
MDPI AG
Link
https://www.mdpi.com/2079-9292/13/4/706/pdf
Reference31 articles.
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3. CMP challenges for advanced technology nodes;Zhang;MRS Adv.,2017
4. Xie, X. (2007). Physical Understanding and Modeling of Chemical Mechanical Planarization in Dielectric Materials. [Ph.D. Thesis, Massachusetts Institute of Technology].
5. Study of Optimal Dummy Fill Modes in Chemical–Mechanical Polishing Process;Ma;IEEE Trans. Compon. Packag. Manuf. Technol.,2012
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