A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

Abstract

This paper presents a fiber-based chromatic dispersion probe for the simultaneous measurement of dual-axis absolute and relative displacement with nanometric resolutions. The proposed chromatic dispersion probe is based on optical dispersion. In the probe, the employed light beam is split into two sub-beams, and then the two sub-beams are made to pass through two optical paths with different optical settings where two identical single-mode fiber detectors are located at different defocused positions of the respective dispersive lenses. In this way, two spectral signals can be obtained to indicate the absolute displacement of each of the dual-axes. A signal processing algorithm is proposed to generate a normalized output wavelength that indicates the relative displacement of the dual-axis. With the proposed chromatic dispersion probe, the absolute and relative displacement measurements of the dual-axis can be realized simultaneously. Theoretical and experimental investigations reveal that the developed chromatic dispersion probe realizes an absolute measurement range and a measurement resolution of approximately 180 μm and 50 nm, respectively, for each axis. Moreover, a relative displacement measurement range and a measurement resolution of about 240 μm and 100 nm, respectively, are achieved for the dual-axis.