Improving the Measurement of Characteristic Parameters for the Determination of GHG Emissions in the Semiconductor and Display Industries in Korea

Abstract

Semiconductor and display industries in the Republic of Korea make up the global electronics market with some of the greatest potential for growth due to accelerated digital transformation. Greenhouse gases (GHGs) present in the Earth’s atmosphere could trap heat and contribute to the greenhouse effect, leading to global warming and climate change, and it is important to note that while GHGs are naturally present in the atmosphere and play a crucial role in regulating the Earth’s temperature, human activities have significantly increased their concentration, leading to accelerated global warming and climate change. Volatile fluorinated compounds (FCs), including perfluorocompounds (PFCs), hydrofluorocompounds (HFCs), NF3, and SF6, are potent long-standing greenhouse gases that are used and emitted by electronics during the manufacturing and display stages of semiconductors. In accordance with global climate change, GHG reduction has developed as a demand of the times, and the electronics industry has also made efforts to reduce GHG emissions in response. Until now, process emissions from the use of fluorinated greenhouse gases (F-GHGs) in various industries have been calculated according to the ’06 IPCC G/L, and emission factors of ’06 IPCC G/L have also been applied. However, the reduction and emission factors proposed in the IPCC G/L are values that do not reflect the latest and advanced reduction technologies in South Korean electronics, and national GHG emissions are overestimated. In this paper, by preparing accurate measurement methods for destruction removal efficiency (DRE), the use rate of gas (Ui), and b-product emission factors (Bby-product, i), which are characteristic parameters for estimating GHG Tier 3a emissions, we aim to increase the accuracy of GHG emissions by advancing emission factors that are unique to the semiconductor and display industries within the Republic of Korea.