Ultra low-temperature microwave annealing for ultra-shallow junctions and P-MOS devices
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Published:2015
Issue:1/2
Volume:12
Page:27
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ISSN:1475-7435
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Container-title:International Journal of Nanotechnology
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language:en
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Short-container-title:IJNT
Author:
Tsai Ming Han,Wu Chi Ting,Hu Shao Yu,Lee Wen Hsi
Publisher
Inderscience Publishers
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Bioengineering