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Positive Displacement Pumps

Published:2016-07-09 Issue: Volume: Page:259-360
ISSN:
Container-title:Handbook of Vacuum Technology
language:
Short-container-title:

Author:

Jousten Karl¹,Dirscherl Jürgen²,Lachenmann Rudolf³,Jünemann Alfons⁴,Friedrichsen -Ing.⁵,Lippelt Erik⁵,Kossek Ing. Boris⁶

Affiliation:

1. Physikalisch-Technische Bundesanstalt; Vacuum Metrology; Abbestr. 2-12 10587 Berlin Germany

2. Vacuubrand GmbH & Co; Alfred-Zippe-Str. 4 97877 Wertheim Germany

3. (retired from) Vacuubrand GmbH & Co; Alfred-Zippe-Str. 4 97877 Wertheim Germany

4. Sterling SIHI GmbH; Lindenstr. 170 25524 Itzehoe Germany

5. Dr.-Ing. K. Busch GmbH; Schauinslandstr. 1 79689 Maulburg Germany

6. Busch Produktions GmbH; Schauinslandstr. 1 79689 Maulburg Germany

Publisher

Wiley-VCH Verlag GmbH & Co. KGaA

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/9783527688265.ch7/fullpdf

Reference101 articles.

1. Pneurop 1983 Vakuumpumpen, Abnahmeregeln

2. Dry pump operating under harsh conditions in the semiconductor industry;Troup;J. Vac. Sci. Technol.,1989

3. Operational experience with totally oil-free rough vacuum pumps;Bez;Vacuum,1990

4. Elimination of backstreaming from mechanical vacuum pumps;Hablanian;J. Vac. Sci. Technol.,1987

5. The emerging technologies of oil-free vacuum pumps;Hablanian;J. Vac. Sci. Technol.,1988

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