Nanoscale Three-Dimensional Characterization with Scalpel SPM
Author:
Affiliation:
1. KU Leuven; Department of Physics and Astronomy (IKS); Celestijnenlaan 200D 3001 Leuven Belgium
2. IMEC; Kapeldreef 75 3001 Heverlee (Leuven) Belgium
Publisher
Wiley-VCH Verlag GmbH & Co. KGaA
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/9783527699773.ch8/fullpdf
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