In-plane and out-of-plane defectivity in thin films of lamellar block copolymers-Reference-Cited by-同舟云学术

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In-plane and out-of-plane defectivity in thin films of lamellar block copolymers

Published:2015-10-29 Issue:2 Volume:54 Page:339-352
ISSN:0887-6266
Container-title:Journal of Polymer Science Part B: Polymer Physics
language:en
Short-container-title:J. Polym. Sci. Part B: Polym. Phys.

Author:

Mahadevapuram Nikhila¹,Mitra Indranil¹,Bozhchenko Alona¹,Strzalka Joseph²,Stein Gila E.¹^ORCID

Affiliation:

1. Department of Chemical and Biomolecular Engineering; University of Houston; Houston Texas 77204-4004

2. Argonne National Laboratory; X-Ray Science Division; Argonne Illinois 60439

Funder

Norman Hackerman Advanced Research Program

National Science Foundation

U.S. DOE

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Physical and Theoretical Chemistry,Condensed Matter Physics

Reference69 articles.

1. Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns

2. Block Copolymer Lithography

3. Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

4. Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

5. Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

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1. Self-brushing for nanopatterning: achieving perpendicular domain orientation in block copolymer thin films;Nanoscale;2024

2. Developing Anisotropy in Self‐Assembled Block Copolymers: Methods, Properties, and Applications;Macromolecular Rapid Communications;2021-07-17

3. Bottlebrush Copolymer Additives for Immiscible Polymer Blends;Macromolecules;2018-07-20

4. Removal Pathways of Out-of-Plane Defects in Thin Films of Lamellar Forming Block Copolymers;Macromolecules;2018-05-24

5. Improved block copolymer domain dispersity on chemical patterns via homopolymer-blending and molecular transfer printing;Polymer;2017-05

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